多层复合Bi/Sb纳米薄膜的制备及热电性能研究  

Preparation and Research on Performance of Nano Multi-layer Bi/Sb Composite Thin Films

作　　者：代晶晶[1] 王学生[1] 疏敏[1] 戚学贵[1] 

机构地区：[1]华东理工大学机械与动力工程学院,上海200237

出　　处：《材料导报》2012年第2期98-100,111,共4页Materials Reports

基　　金：国家自然科学基金(50706012)

摘　　要：选取单晶硅作为隔热衬底,Bi和Sb材料作为靶材,采用磁控溅射技术溅射制备多层复合纳米薄膜。研究了当固定调制周期为40nm,Bi和Sb的调制比分别为1∶1、3∶2、4∶1和1∶4时,Bi/Sb超晶格复合薄膜的See-beck系数、电导率和功率因子在160～250K温度范围内随温度的变化。发现当调制比为1∶4时,Bi/Sb薄膜的功率因子明显高于其它3种情况。The nano multi-layer composite material thin film, with single-crystal silicon as thermal insulation substrate and I3i and Sb as sputter targets respectively, was prepared by magnetron sputtering. At the same value of modulation periods（40nm）, four different Bi/Sb modulation ratios： 1 ： 1,3 ： 2,4 ：1,1 ： 4, were used. The Seebeck coefficient, electric conductivity and power factor of the superlattice composite thin films , composed of Bi and Sb, varied with the variation of temperature which ranged from 160K to 250K. It could he found that the power factor was significantly better with the modulation ratio 1 - 4 than with the other modulation ratios.

关 键 词：磁控溅射 纳米薄膜 Bi/Sb SEEBECK系数 电导率 功率因子 

分 类 号：TN377[电子电信—物理电子学]