一种气流式全方位水平姿态敏感技术  

A sensitive technique of airflow omnibearing level posture

作　　者：朴林华[1] 丁霞[2] 余全刚[1] 王星[1] 张保丽[1] 梅传志[1] 

机构地区：[1]北京信息科技大学北京市传感器重点实验室,北京100101 [2]青岛科技大学数理学院,山东青岛266061

出　　处：《传感器与微系统》2012年第1期32-34,37,共4页Transducer and Microsystem Technologies

基　　金：国家自然科学基金资助项目(60772012);新世纪优秀人才支持计划资助项目(NCET);北京市重点实验室开放课题资助项目;北京市新世纪百千万人才工程培养计划资助项目;现代测控技术教育部重点实验室资助项目;北京市教委科技面上项目(KM201110772020)

摘　　要：提出了一种气流式全方位水平姿态敏感技术。在密闭腔体内有一非闭合环形圈热源,在热源周围设置8根两两相对平行的热电阻丝构成全方位水平姿态敏感元件;通过前置信号电路和数字电路构成信号处理电路,实现倾角电压信号的提取、全方位信号合成和全方位倾角信号的灵敏度补偿。测试结果表明:分辨率优于0.1°,方位角测量范围可达到360°,倾斜角度测量范围可达到20°。这种技术可获得较高的精度和灵敏度,不存在方位角的测试盲点。A sensitive mechanism of micromachined airflow omnibearing level posture is introduced. There is a non-closure annulus heat source in the airtight space, and around the heat source, there are eight parallel heat resistance wire composed omnibearing level posture sensitive element. Signal processing circuit is composed of presignal circuit and digital circuit, to obtain voltage, omnibearing signal synthesis and sensitivity compensation of omnibearing tile angle signal. It is testified that resolution is prior to 0.1°, the scope of azimuth is 360°, the scope of tile angle is 20°. The sensor is not only in small size but also in simply crafting. It is good in output consistency of sensitive element and suitable for mass production.

关 键 词：气流 全方位 水平姿态 敏感技术 

分 类 号：TN379[电子电信—物理电子学]