非硅MEMS电容式微加速度计的测控电路设计  

Design of detection and control circuits for capacitive microaccelerometer based on non-silicon MEMS

作　　者：张运奎[1] 崔峰[1] 万镇[1] 刘武[1] 张卫平[1] 

机构地区：[1]上海交通大学微纳科学技术研究院微米/纳米加工技术国家级重点实验室,上海200240

出　　处：《传感器与微系统》2012年第2期90-92,95,共4页Transducer and Microsystem Technologies

基　　金：国防科技重点实验室基金资助项目(9140C7903080807);上海市自然科学基金资助项目(10ZR1415500);国家自然科学基金资助项目(51075278)

摘　　要：为了提高MEMS微加速度计的量程和抗过载能力,设计了基于UV-LIGA技术的非硅MEMS电容式微加速度计。针对该加速度计,设计了基于相敏解调的差分电容测控电路。检测通道主要由前置级电荷积分放大电路、带通滤波电路、相敏解调器、低通滤波以及电平转换电路组成,反馈通道由低通滤波和加法电路组成。完成了微加速度计测控电路的调试和检测通道的标定实验,实验表明:检测通道的量程约为±6 pF,灵敏度为89.3 mV/pF,线性度为2.59%,满足加速度计检测通道的要求。To improve the anti-over loading capability of MEMS microaccelerometer, a new non-silicon MEMS capacitive microaccelerometer based on UV-LIGA technology and its detection and control circuits of differential capacitance based on phase-sensitive demodulation is designed. The detection channel mainly consists of charge integrated preamplifier, band-pass filter, phase-sensitive demodulator, low-pass filter and voltage conversion circuits. The feedback channel consists of low-pass filter and adder circuits. The debugging of system detection and control circuits and the calibration for the detection channel is finished. The results show that the range of the detection channel is about ±6 pF, the sensitivity is 89.3 mV/pF, and linearity is 2.59 % respectively, which can meet the requirements of the detection channel.

关 键 词：微机电系统 微加速度计 差分电容 测控电路 标定 

分 类 号：V241.4[航空宇航科学与技术—飞行器设计] TP212.1[自动化与计算机技术—检测技术与自动化装置]