剥离工艺制作SAW滤波器IDT的研究  

Study on Fabrication of SAW Filters IDT by Lift-Off Technology

作　　者：陈颖慧[1,2] 高杨[1] 郑英彬[1] 赵兴海[1] 

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621900 [2]中国工程物理研究院北京研究生部,北京100088

出　　处：《微纳电子技术》2012年第2期124-128,共5页Micronanoelectronic Technology

基　　金：中国工程物理研究院科技发展基金重点课题(2010A0302013)

摘　　要：研究了用于声表面波滤波器的微米尺度的叉指换能器的制作工艺。利用剥离工艺,分别采用铝和铬金两种金属制作了叉指换能器的电极,分析了剥离工艺制作叉指电极时的工艺特性。对加工样品的测量分析结果表明,利用剥离工艺制备的叉指换能器电极线条光滑、陡直、清晰,但是成品率较低。对比分析了采用铝和铬金制作的叉指换能器样品结构,结果表明两种金属材料在剥离液中的腐蚀时间不同,铝材料需要较长的剥离时间;两种材料制作的电极图形质量也有差异,铝材料制作的电极更为陡直、精细。The fabrication process of the interdigital transducer（IDT） in micro scale for surface acoustic wave（SAW） filters was studied.Using the lift-off technology,the IDT electrodes were prepared with two kinds of metal materials including Al and Cr-Au,respectively.The process characteristic of the IDT fabricated by lift-off technology was analyzed.The test results of the processing samples indicate that the electrode lines of the IDT fabricated by the lift-off technology are smooth,steep and distinct,but the finished products rate is low.The sample structures of the IDT using Al and Cr-Au were compared.The results show that the corrosion time of the two kinds of metal materials in the lift-off liquid is different,the Al material need the longer time;the graphics quality of the electrodes fabricated with two kinds of metal materials is different,the electrode fabricated with the Al material is more steep and refined.

关 键 词：声表面波(SAW) 滤波器 叉指换能器(IDT) 剥离 陡直度 

分 类 号：TN305[电子电信—物理电子学]