大口径平板中频波前均方根的测量方法  

Testing of Root Mean Square of Mid-Spatial-Frequency Wavefront for Large Flat

作　　者：柴立群[1] 石琦凯[1] 魏小红[1] 徐建程[2] 李强[1] 刘昂[1] 徐凯源[1] 

机构地区：[1]成都精密光学工程研究中心,四川成都610041 [2]浙江师范大学信息光学研究所,浙江金华321004

出　　处：《中国激光》2012年第1期173-178,共6页Chinese Journal of Lasers

基　　金：中国工程物理研究院资助项目(05010708)资助课题

摘　　要：在高功率激光系统中,大口径元件的中频波前影响系统的安全运行,中频波前均方根(PSD1)是用来评价中频波前质量的关键参数。由于大口径干涉仪在系统传递函数(STF)上不能完全满足中频波前的检测要求,提出采用小口径高分辨率干涉仪检测的统计分析方法,建立了统计理论模型,分析了测量不确定度。建立了子区域PSD1检测装置,提出了子区域倾斜补偿法,提高了检测精度。理论及实验结果表明针对400mm×400mm分析区域,子区域数量设置为4×4,置信水平为95.4%时,测量不确定度为±0.266nm。该方法与大口径干涉仪检测法的对比实验表明,400mm×400mm分析区域内检测结果偏差小于5%。子区域统计分析法是对大口径干涉仪检测法的有益补充,对先进光学制造工艺的优化具有重要的参考价值。In high-power laser system,mid-spatial-frequency wavefront of large flat influences safety of the system and root mean square of mid-spatial-frequency wavefront（PSD1） is used to evaluate corresponding wavefront.Because large-aperture interferometer can′t fully meet the demand of the need of system transfer function（STF） for testing mid-spatial-frequency wavefront,a statistical method based on small-aperture interferometer is proposed,and the uncertainty is analyzed.Testing system is set up,and the sub-region tilt compensating method is developed.Testing resolution is improved.Theoretical and experimental result shows that for 400 mm×400 mm analyzing region,when the number of sub-region is set to 4×4 and confidence level is 95.4%,uncertainty is ±0.266 nm.In comparing test with large-aperture interferometer,deviation between two methods in analyzing region of 400 mm×400 mm is less than 5%.Sub-region statistical analyzing method is a useful compensation for large-aperture testing method and plays a critical role for optimization of advanced optical fabrication technics.

关 键 词：测量 波前检测 统计方法 大口径平板 中频波前均方根 

分 类 号：O436.1[机械工程—光学工程]