绒面AZO最新研究进展及应用  

Recent development and application of surface-textured Al doped ZnO transparent conductive oxide thin films

作　　者：王文娜[1] 张大伟[1] 黄元申[1] 倪争技[1] 庄松林[1] 

机构地区：[1]上海理工大学光电信息与计算机工程学院,上海200093

出　　处：《激光杂志》2012年第1期1-4,共4页Laser Journal

基　　金：国家自然科学基金(60908021);上海市纳米专项(1052nm07100);上海市科技启明星(09QA1404200);宝山区产学研项目;AZO透明导电膜的研制;上海市重点学科项目第三期(S30502);上海市研究生创新基金

摘　　要：掺铝氧化锌(AZO)透明导电膜作为一种光电性能优异的透明导电膜(TCO)受到研究人员的广泛关注,并被认为是当前大规模使用的传统铟锡氧化物(ITO)的替换材料。绒面AZO薄膜因其电阻率低、高透过率且具有良好的陷光效果,可以提高太阳能电池的光电转换效率,而被认为是太阳能电池前电极的理想材料。综述了绒面AZO透明导电膜的制备方法和性能研究现状,并针对AZO的国内外研究状况提出了今后的发展趋势和研究方向。Aluminum doped zinc oxide（AZO） transparent conductive thin films as a kind of transparent conductive film（TCO） have received a wide attention by researchers because of their superior photoelectric performance,and are considered as the replacement materials of the current large-scale use of the traditional indium tin oxide（ITO）.Furthermore,surface-textured AZO has been considered an ideal material for the former electrode of solar cells due to its low resistivity,high transmittance and excellent liglht trapping effect which can improve the conversion efficiency of solar cells.Thestatus of preparation and properties of AZO transparent conductive thin filmsare reviewed;in addition,the AZO research trends and future research directions are pointed out based on the research situation home and abroad.

关 键 词：透明导电膜 绒面结构 AZO薄膜 太阳能电池 

分 类 号：O472[理学—半导体物理] O472[理学—物理]