适用于ICF靶夹持的多用微夹持器  

Multi-purpose microgripper for ICF targets

作　　者：余大海[1] 吴文荣[1] 罗敏[1] 王红莲[1] 李波[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《强激光与粒子束》2012年第1期115-118,共4页High Power Laser and Particle Beams

基　　金：国家高技术发展计划项目

摘　　要：针对惯性约束聚变靶零件的特点和靶装配应用环境,研制了一种多用微夹持器。该微夹持器以压电陶瓷驱动柔性钳体,集成张合量和夹持力控制功能,可更换各种形状夹口和调整夹口初始开口距离,以适应多种靶零件的夹持。利用有限元分析方法对钳体柔性机构进行了优化设计。通过检测钳体张合时不同部位柔性铰链的应变量,实现了张合量和夹持力的独立控制,并对张合量和夹持力进行了精确标定。实验结果表明:微夹持器张合量达到1 320μm,其控制分辨力为5μm;夹持力为365.0 mN,其控制分辨力1.3 mN。A multi-purpose microgripper for ICF targets has been developed based on the characteristic of ICF targets and target-assembly. The microgripper, whose fingers can be changed for different ICF targets, works with flexure hinge and piezoceramics actuator. The flexure hinges of the microgripper are designed and optimized based on the finite element analysis, and the best simulation results are presented. By measuring the strains of the different flexure hinges, the displacement and holding force of the microgripper can be detected independently and they are calibrated precisely. The displacement reaches 1 320 p.m and its detection resolution is 5 μm. The holding force is 365.0 mN and its detection resolution is 1.3 mN.

关 键 词：微夹持器 柔性铰链 微力检测 有限元分析 ICF靶 

分 类 号：TP241.3[自动化与计算机技术—检测技术与自动化装置]