采用奇偶函数法的平面面形绝对测量技术仿真分析  

Analysis and simulation of absolute test of flats decomposed to even and odd functions

作　　者：贾辛[1] 邢廷文[1] 魏豪明[1] 李云[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209

出　　处：《红外与激光工程》2012年第2期500-505,共6页Infrared and Laser Engineering

基　　金：国家自然科学基金(10874181)

摘　　要：随着现代工业和科学技术的飞速发展,特别是近代大规模集成电路技术的不断提高,对系统精度的要求日益提高。在光刻系统中,越来越短的特征尺寸要求我们使用更高精度的光刻物镜。在这之前我们需要更高精度的检测技术来满足加工及系统集成的需要。高精度移相干涉仪的测量结果包含了待测面和参考面的误差,移相干涉测量法的测量精度受限于参考面的精度。绝对测量方法通过移除参考面的误差,从而达到提高测量精度的目的。回顾了光学平面面形绝对测量方法,重点描述了基于奇偶函数的绝对测量方法。分析了旋转角度误差对测量结果的影响,通过旋转更小的角度求出了高阶面形拟合分量,给出了求高阶面形拟合分量的通项公式。High-accuracy system is needed with the rapid development of modern industry and technology,especially the technology of modern large scale integrated circuit.In lithography system,and more precision lens are needed to satisfy the shorter and shorter lithography critical dimension,and more precision testing technology is needed to satisfy the requirement of fabrication and integration.Results of the high-accuracy phase shifting interferometeric testing contain the reference surface errors and test surface errors.The test accuracy is restricted by the error of reference surface.As a result,so-called absolute tests must be used to improve the test accuracy which can test the systematic errors,including the reference surface of the instrument.By reviewing traditional absolute test of flats methods and emphasizing the method of even and odd functions.The influence of rotation errors was analyzed and the general polynomial of the high order surface parts was given through rotation smaller angle.

关 键 词：光学检测 绝对测量 奇偶函数 面形检测 

分 类 号：TH74[机械工程—光学工程]