大型天文望远镜主镜镀膜技术  

Large-telescope primary mirror coating technology

作　　者：杜维川[1,2] 刘洪祥[1] 裴文俊[1] 王长军[1] 

机构地区：[1]中国科学院光电技术研究所,成都610209 [2]中国科学院研究生院,北京100039

出　　处：《强激光与粒子束》2012年第2期365-369,共5页High Power Laser and Particle Beams

摘　　要：采取主镜镜面向上真空蒸镀制备方式,开展了大型天文望远镜主镜铝加介质保护反射膜技术研究。结合ZZS3200型镀膜设备真空室几何配置,对传统膜厚分布计算物理模型进行了修正,分别分析了铝膜与介质膜层膜厚均匀性。结果表明:理论分析与实验数据一致,直径2.4m范围内膜厚不均匀性约5.5%。通过优化工艺,成功制备出1.8m平面镜薄膜元件,在350～1 800nm波段范围内,膜层平均反射率88.6%,通过了环境稳定性测验。The technology for coating the telescope primary mirror with protected aluminium layer is studied during the pre- parative process, when the mirror is face up. According to the geometry of ZZS3200 large coating equipment, the traditionally cal- culative model is modified, and the uniformity of the aluminium and dielectric layers is analyzed separately. The simulated results accord with the experimental results, and in the 2.4 m diameter range, the non-uniformity of the whole film is within 5.5%. The 1.8 m-diameter plane reflective primary mirror has been prepared with optimized technical parameters. Its reflectance after coating is 88.6% in the wavelength range from 350 to 1 800 nm. Furthermore, the films have passed the environment stability test suc- cessfully.

关 键 词：均匀性 反射率 环境稳定性 主镜 镀膜 

分 类 号：O484[理学—固体物理]