微机械加速度计内部噪声影响的对比分析  

Comparative analysis of the effects of internal noises on micromachined accelerometer

作　　者：张霞[1] 闫社平 

机构地区：[1]西安邮电学院电子工程学院,陕西西安710121 [2]上海汉得信息技术股份有限公司技术开发中心,上海201203

出　　处：《西安邮电学院学报》2012年第2期57-61,共5页Journal of Xi'an Institute of Posts and Telecommunications

基　　金：西安邮电学院中青年教师科研基金资助项目(0001282)

摘　　要：以一种新型的梳状栅电容结构微机械加速度计为研究对象,对比分析机械热噪声和量子噪声对其检测精度的影响。研究结果表明,当微机械加速度传感器的结构尺寸接近纳米尺度时,在一定的温度条件下,量子噪声取代了机械热噪声成为影响加速度传感器自身噪声性能的主要因素,且量子噪声等效加速度大于机械热噪声等效加速度的温度临界点随着器件结构尺寸的减小而增大。The effects of mechanical-thermal noise and quantum noise on the measurement accuracy of a novel comb-bar structure micromachined accelerometer were analyzed.The comparative analysis results show that when the structure dimension approaches to nanometer scale,quantum noise substitutes mechanical-thermal noise and becomes the main factor which affects the inherent noise performance of the micromechanical accelerometer.The smaller the structure dimension becomes,the higher the temperature critical point at which the quantum noise equivalent acceleration is greater than the mechanical-thermal noise equivalent acceleration becomes.

关 键 词：微机械加速度计 机械热噪声 量子噪声 检测精度 

分 类 号：TH824[机械工程—仪器科学与技术]