紫外波段SiO_2/Si_3N_4介质膜分布式布拉格反射镜的制备与研究  

Design and fabrication of SiO_2/Si_3N_4 dielectric distributed Bragg reflectors for ultraviolet optoelectronic applications

作　　者：李志成[1] 刘斌[1] 张荣[1] 张曌[1] 陶涛[1] 谢自力[1] 陈鹏[1] 江若琏[1] 郑有炓[1] 姬小利[2] 

机构地区：[1]南京大学电子科学与工程学院,固体微结构物理国家重点实验室,江苏省光电信息功能材料重点实验室,南京210093 [2]中国科学院半导体研究所,半导体照明研发中心,北京100083

出　　处：《物理学报》2012年第8期440-445,共6页Acta Physica Sinica

基　　金：国家重点基础研究发展计划(批准号:2011CB301900);国家自然科学基金(批准号:60990311;60906025;60936004;10904100;61176063);江苏省高等学校自然科学基金(批准号:BK2010385;BK2010178);霍英东教育基金(批准号:122028);中央高等学校基本科研基金(批准号:1105021008);高等学校博士学科点专项科研基金(批准号:20090091120020)资助的课题~~

摘　　要：采用光学传递矩阵方法设计了紫外波段SiO_2/Si_3N_4介质膜分布式布拉格反射镜,并利用等离子体增强化学气相沉积技术在蓝宝石(0001)衬底上制备了SiO_2/Si_3N_4介质膜分布式布拉格反射镜.光反射测试表明,样品反射谱的峰值波长仅与理论模拟谱线相差10 nm,并随着反射镜周期数的增加而蓝移.由于SiO_2与Si_3N_4具有相对较大的折射率比,因而制备的周期数为13的样品反射谱的峰值反射率就已大于99%.样品反射谱的中心波长为333 nm,谱峰的半高宽为58 nm.样品截面的扫描电子显微镜和表面的原子力显微镜测量结果表明,样品反射谱的中心波长蓝移是由子层的层厚和界面粗糙度的变化引起的.X射线反射谱表明,子层界面过渡层对于反射率的影响较小,并且SiO_2膜的质量比Si_3N_4差,也是造成反射率低于理论值的原因之一.In this paper, we design a SiO2/Si3N4 dielectric distributed Bragg reflector （DDBR） by the transfer-matrix method, which is grown by plasma-enhanced chemical vapor deposition on sapphire （0001）. There exists a slight difference between theoretical and experimental results in peak wavelength （- 10 nm）. The peak wavelength is blue shifted with the number of DDBR pairs increasing. The 13-pair DDBR provides a 58 nm wide stop band centered at 333 nm with a maximal reflectivity of higher than 99%, as the refractive index ratio of Si3N4 to SiO2 is relatively high. It is proved by the scanning electron microscope and atomic force microscope measurements that the variations of thickness and roughness of Si3N4 layer with respect to SiO2 layer during growth contribute to the blue shift of peak wavelength. The X-ray reflectivity measurements indicate that the interfacial degradation of the samples has little effect on the maximum reflectivity, and the relatively poor quality of SiO2 compared with Si3N4 may be one of the reasons that cause the difference between the measurements and simulations.

关 键 词：介质膜分布式布拉格反射镜 传递矩阵方法 X射线反射 

分 类 号：O484.41[理学—固体物理]