不同测试电压下多壁碳纳米管湿度传感器的稳定性(英文)  

Stability of Carbon Nanotubes Humidity Sensor UnderDifferent Testing Voltages

作　　者：赵振刚[1] 陈伟平[1,2] 刘晓为[1,2] 李拓[1] 王鑫[1] 

机构地区：[1]哈尔滨工业大学微电子科学与技术系,哈尔滨150001 [2]微系统与微结构教育部重点实验室,哈尔滨150001

出　　处：《纳米技术与精密工程》2012年第3期225-228,共4页Nanotechnology and Precision Engineering

摘　　要：为提高碳纳米管(CNTs)湿度传感器的检测精度,研制了一种电阻型碳纳米管湿度传感器.阐述了传感器的结构、工作原理与制作过程,并对传感器的稳定性进行了实验与理论分析.建立并求解了对应于两根碳纳米管间势垒的薛定谔方程.分析结果表明传感器内部碳纳米管的稳定决定了传感器的稳定性,并且测试电压会影响碳纳米管的稳定性对传感器电阻波动的影响.实验结果表明传感器的工作电压影响着传感器的稳定性,当测试电压为5V时传感器电阻波动范围大约是工作电压为15 V时的5倍.A carbon nanotubes（CNTs） humidity sensor,which has sensitive resistance to humidity,was made to improve its sensing precision.The structure,working principle and fabrication process of the sensor were presented and its stability properties were studied both theoretically and experimentaly.Schrdinger equation associated with the potential barrier between two CNTs was set up and solved.Analytical results indicate that the fluctuation of sensor resistance is caused by the instability of CNTs,and testing voltage can change the relationship between sensor fluctuation and CNTs stability.The sensor output stability is also proved correlative to testing voltage by experimental results,and data shows that the fluctuating range of sensor resistance at the testing voltage of 5 V is about 5 times of that at 15 V.

关 键 词：碳纳米管(CNTs) 湿度传感器 稳定性 势垒 薛定谔方程 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]