热处理对氨基磺酸盐镀镍层性能的影响  

Effect of heat treatment on properties of sulfamate nickel coating

作　　者：周玉凤[1] 李艳春[2] 程萍[2] 樊江玲[1] 汪红[2] 

机构地区：[1]上海工程技术大学机械工程学院,上海201620 [2]上海交通大学微纳科学技术研究院微米/纳米加工技术重点实验室,上海200240

出　　处：《电镀与涂饰》2012年第5期14-17,共4页Electroplating & Finishing

基　　金：国家质检总局公益性专项项目(201110051);上海工程技术大学"085知识创新工程"项目(JZ0906)

摘　　要：基于非硅微器件材料的特殊性能要求,研究了热处理对氨基磺酸盐镀镍层热稳定性的影响。随热处理温度升高,镍镀层的硬度先缓慢下降,高于300°C后则急剧降低。镍镀层晶粒变粗、晶界减少及受外力作用时易变形是热处理后镍镀层硬度降低的主要原因。热处理温度对镍镀层耐蚀性的影响不显著。热处理温度低于400°C时,镍镀层与Cr/Cu、Ti基的结合强度随热处理温度的升高而显著增强。因此,氨基磺酸盐镀镍层在低于300°C的环境中使用时,其性能基本稳定。The effect of heat treatment on thermal stability of sulfamate nickel coating was studied based on the special performance requirement of non-silicon micro-device materials. The hardness of nickel coating is decreased slowly initially with increasing heat treatment temperature, while decreased rapidly at temperatures above 300 ℃. The coarsening of grain, decreasing of grain boundaries and easy deformation under external force are the main reasons for the decrease of hardness of nickel coating after heat treatment. The effect of heat treatment temperature on corrosion resistance of nickel coating is not significant. The adhesion strength of nickel coating between Cr/Cu or Ti substrate is increased remarkably with the increasing of heat treatment temperature when the heat treatment temperature is below 400 ℃. Accordingly, the performance of nickel coating is basically stable when used at a temperature below 300 ℃.

关 键 词：微器件 氨基磺酸盐镀镍 热处理 硬度 结合强度 耐蚀性 

分 类 号：TQ153.1[化学工程—电化学工业] TG113.2[金属学及工艺—物理冶金]