基于杠杆的微机械陀螺结构设计与仿真  

Structure Design and Simulation of the MEMS Gyroscope Based on Leverage Mechanism

作　　者：李小卿[1] 常洪龙[1] 焦文龙[1] 谢建兵[1] 袁广民[1] 

机构地区：[1]西北工业大学陕西省微/纳米系统重点实验室,西安710072

出　　处：《微纳电子技术》2012年第5期313-317,共5页Micronanoelectronic Technology

基　　金：陕西省13115科技创新工程重大科技专项(2009ZDKG-24)

摘　　要：提出了一种基于机械杠杆放大机构的微机械陀螺设计方案,用于提高微机械陀螺的灵敏度和精度。该杠杆放大机构使用在陀螺的驱动模态中,通过杠杆将驱动梳齿位移放大后传递到质量块上,在陀螺驱动模态谐振频率一定的情况下增大了质量块在驱动方向的运动速度,提高了陀螺敏感模态的科氏力及陀螺表头的机械灵敏度,从而提高陀螺系统的灵敏度和精度。在Coventor-ware中对陀螺结构进行了系统级仿真,仿真结果表明在杠杆动力臂和阻力臂长度之比为1∶5.2时,陀螺机械灵敏度放大了5.9倍。因此,通过在微机械陀螺驱动模态中使用杠杆结构可以提高其灵敏度和精度。The design scheme of the MEMS gyroscope based on the mechanical lever amplification mechanism was presented to improve the sensitivity and precision of the MEMS gyroscope.The leverage amplification mechanism was applied in the driving-mode of the gyroscope,the displacement of the driving comb was amplified by the lever and transfered to the mass.At the certain resonant frequency of the gyroscope driving-mode,the mass velocity was increased in the driving direction,and Coriolis force of the gyroscope sensitive mode and the mechanical sensitivity of the gyro header were improved,thus the sensitivity and precision of the gyroscope were improved.The system-level simulation of the gyroscope structure was carried out through the Conventorware.The result shows that the mechanical sensitivity is amplified of 5.9 times when the length ratio of the power arm and resisting arm is 1∶5.2.The sensitivity and precision can be improved by applying the leverage mechanism in the MEMS gyroscope.

关 键 词：微机械陀螺 杠杆 放大 机械灵敏度 系统级仿真 

分 类 号：TH703[机械工程—仪器科学与技术]