集成微光机电系统研究现况及其产业化前景  

RESEARCH AND INDUSTRIALIZATION OF INTEGRATED MICRO OPTO MECHATRONICS SYSTEMS, THE PRESENT AND FUTURE

作　　者：王跃林[1] 王渭源[1] 

机构地区：[1]中国科学院上海冶金研究所传感技术国家重点实验室,上海200050

出　　处：《功能材料与器件学报》2000年第1期1-6,共6页Journal of Functional Materials and Devices

摘　　要：本文介绍了国际集成微光机电系统的研究现况及其产业化前景 ;在此基础上 。In this paper, the international trends on the research and industrialization of Integrated Micro Opto Mechatronics Systems are described. On this basis, the idea to speed up the research and industrialization in this field in China are suggested.

关 键 词：微电子机械系统 微系统 信息系统 产业化 

分 类 号：TH－39[机械工程]