掩模清洗机加热系统控制及故障排除  

Mask Cleaning Machine Heating System Control Troubleshooting

作　　者：陈卓 严剑荫 

机构地区：[1]无锡中微掩模电子有限公司,江苏无锡214035

出　　处：《电子工业专用设备》2012年第6期39-45,共7页Equipment for Electronic Products Manufacturing

摘　　要：在集成电路掩模(Mask)生产过程中,清洗机是关系到掩模制板质量的一个重要设备。因为掩模工艺需要使用大量的化学溶剂,并需配置多个加热控制系统,致使清洗设备成为一个故障率高、易损件损坏多的设备。介绍清洗机加热系统控制原理,其中包括Genius I/O、手持监控器、PID控制、电流监控器、安全电路和加热脉冲。对其控制原理及电路进行了解析,最后通过应用实例给出了故障的排除方法。IC mask in the production process , cleanning machine is an important relationship to the quality of the mask making. Because Mask process requires a large number of chemical solvents and the need to configure multiple heating control system, It makes this device to be a high failure rate, the vulnerability of more damage to the equipment. The article describes in detail the cleanning machine heating system control theory, including the Genius I/0, the handheld monitor, PID control, current monitor, the safety circuit and the heating pulse .On the control principle and circuit of the machine and troubleshooting an application example.

关 键 词：掩模 手持监控器 PID控制 电流监控器 安全电路 加热脉冲 

分 类 号：TN305.97[电子电信—物理电子学]