行走式尺蠖压电直线驱动器研究现状及关键技术综述  

State-of-the-Art and Key Technologies in Piezoelectric Linear Actuator of Walker Inchworm

作　　者：马立[1,2] 周莎莎[1] 王坤[1] 

机构地区：[1]上海大学机电工程与自动化学院,上海200072 [2]哈尔滨工业大学机器人技术与系统国家重点实验室,哈尔滨150080

出　　处：《微电机》2012年第7期82-85,共4页Micromotors

基　　金：国家自然科学基金(50905105);机器人技术与系统国家重点实验室开放课题(SKLRS-2010-MS-02)

摘　　要：尺蠖压电驱动器具有大行程、高精度、大输出力、快速响应、无磁场影响等优点,在超精密定位领域具有广泛的应用前景。而行走式尺蠖压电驱动器又以箝位机构结构简单、刚度和动态性能好,中间驱动机构偏摆小,整体体积小,运动稳定性好等特性引起世界各国的关注。在阐述行走式尺蠖压电驱动器的本质、组成结构及运动原理的基础上,对其国内外研究现状及其关键技术进行了分析,并对其发展趋势进行了展望。Piezoelectric inchworm actuators can achieve the ability of large displacement,high precision,large output force,fast response and no magnetic influence,so widely used in ultra-precision positioning area.Piezoelectric linear actuators of walker inchworm have the advantage of simple structure,high stiffness,good dynamic performance in clamping mechanism,and small deflection,compact structure,good motion stability in middle drive mechanism.The essence,composition and motion principle of piezoelectric linear actuators of walker inchworm were presented firstly.Then State-of-the-Art and key technologies of inchworm actuators were analyzed.Finally,the development trends of inchworm actuators were discussed.

关 键 词：压电驱动器 尺蠖运动 箝位机构 微位移检测 PID控制 

分 类 号：TP272[自动化与计算机技术—检测技术与自动化装置]