模具法制备CVD金刚石热沉片的温度场与流场研究  

Temperature and Flow Field in the CVD System for Diamond Heat Sink Deposition Using Mould Method

作　　者：薛海鹏[1] 卢文壮[1] 沈飞荣[1] 孙达飞[1] 王浩[1] 左敦稳[1] 

机构地区：[1]南京航空航天大学机电学院,南京210016

出　　处：《人工晶体学报》2012年第4期877-882,895,共7页Journal of Synthetic Crystals

基　　金：国家自然科学基金(51075211);教育部博士点基金项目(20113218110018);南京航空航天大学研究生创新基金资助(kfjj20110226)

摘　　要：本文通过有限元仿真研究了模具法制备CVD金刚石热沉片的温度场和流场,并对制备参数进行了优化。实验与仿真的结果均表明,进气量的大小对衬底附近流场的均匀性影响显著,热丝温度、热丝间距以及热丝到衬底的距离对衬底的平均温度影响显著,热丝间距和热丝温度对衬底温度的均匀性影响显著;模具法制备的CVD金刚石复制了模具型腔,保证了热沉片的结构完整性和尺寸精度,最终制备了精度较高的小型CVD金刚石热沉片。The temperature and flow field in the deposition of diamond heat sink by mould method were analyzed using Finite Element Simulation, and the preparation parameters were optimized in the article. The experiment and simulation results show that the air inflow has a significant influence on the uniformity of flow field round by the substrate; the temperature and space of hot filaments as well as the distance between hot filaments and substrate have a notable effect on the average temperature of substrate; the temperature of hot filaments and space between them have a distinct impact on the uniformity of the substrate temperature. In order to deposit the CVD diamond heat sink with small size and high precision, the mould method were used to copies the mold cavity which ensures the structural integrity and dimension of the heat sink.

关 键 词：模具 CVD金刚石 热沉 温度场 流场 

分 类 号：TQ174[化学工程—陶瓷工业]