渥拉斯顿棱镜偏摆对激光外差干涉直线度测量的影响分析  

Analysis of Laser Heterodyne Interferometric Straightness Measurement Errors Induced by Wollaston Mirror Tilting

作　　者：张华叶[1] 张恩政[1] 严利平[1] 陈本永[1] 

机构地区：[1]浙江理工大学纳米测量技术实验室,杭州310018

出　　处：《浙江理工大学学报（自然科学版）》2012年第5期672-676,682,共6页Journal of Zhejiang Sci-Tech University(Natural Sciences)

基　　金：国家自然科学基金项目(90923026)

摘　　要：描述激光外差干涉直线度及其位置测量方法;分析由渥拉斯顿棱镜偏摆角引起的测量误差,建立激光外差干涉直线度及其位置测量误差的数学模型,并进行仿真分析研究。结果表明:渥拉斯顿棱镜倾角和摆角引入的测量误差为正弦型误差分量,当渥拉斯顿棱镜偏摆角为1°时,直线度的测量误差有约为100nm,位置误差约为1nm;当渥拉斯顿棱镜的倾角为15″时,直线度测量误差约为700nm,位置误差约为15nm。In this paper, a method of measuring the straightness error and its position was developed based on laser heterodyne interferometry. The measurement error of straightness as well as the displacement caused by the pitch and roll angles of the Wollaston mirror were analyzed. One corresponding mathematical model was achieved and the simulation was carried out. The simulation experiments show that the error caused by the pitch and roll angles of the Wollaston mirror is a sinusoidal error. The measurement errors of the straightness error and of the position error produced by 1° of the pitch angle are about 100 and 1 nm, respectively. The measurement errors of the straightness error and of the position error produced by 15＂ of the roll angle are approximately 700 and 15 nm, respectively.

关 键 词：激光外差干涉仪 渥拉斯顿棱镜 直线度 倾角 摆角 

分 类 号：TH741[机械工程—光学工程]