MEMS红外光源研究及其应用  

Research and Application of MEMS Infrared Sources

作　　者：田英[1] 熊继军[1] 关新锋[1] 李佩青[1] 孟青[1] 丑修建[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2012年第9期607-612,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(51075374)

摘　　要：首先介绍了红外光源的类型,从波长范围、调制频率、输出功率以及制作成本等方面比较了三种不同类型红外光源的优缺点。分析了基于微机电系统(MEMS)加工技术的红外光源工作原理和类型。系统综述了MEMS红外光源的国内外研究现状,包括不同辐射层材料和不同结构的MEMS红外光源。详细描述了MEMS红外光源在红外气体传感器、目标识别装置、红外通信装置中的应用。讨论了其在结构设计和加工过程中存在的高辐射率发光材料的制作、红外光源薄膜热应力的释放以及机械强度低等技术瓶颈问题,并简单展望了MEMS红外光源的未来发展趋势。The types of the infrared sources are introduced.The advantages and disadvantages of three different types of the infrared sources are compared from the wavelength range,modulation frequency,output power and cost.The principle and types of MEMS infrared sources are analyzed.The current research situation of MEMS infrared sources are summarized systematically at home and abroad,including the different radiation layer materials and structures of MEMS infrared sources.The applications of MEMS infrared sources in infrared gas sensors,target identification devices,infrared communication devices are described in detail.The technical bottlenecks are discussed from the structural design and processing technology,including the fabrication of high radiation rate materials and the thermal stress release and low mechanical strength of membranes,and the development tendencies of MEMS infrared sources are proposed.

关 键 词：红外光源 微机电系统(MEMS) 辐射强度 电光转换效率 工业安全生产 大气环境监测 

分 类 号：TN214[电子电信—物理电子学] TH703[机械工程—仪器科学与技术]