基于激光光切法的MEMS器件高度在线检测方法(英文)  

Online Height Detection Method of MEMS Device Based on Laser Light Section

作　　者：曾涛[1] 石庚辰[1] 张兵[1] 王禛[1] 王倩倩[1] 

机构地区：[1]北京理工大学机电工程与控制国家级重点实验室,北京100081

出　　处：《纳米技术与精密工程》2012年第5期422-428,共7页Nanotechnology and Precision Engineering

基　　金：武器装备预研基金资助项目

摘　　要：为了解决MEMS器件在加工过程中在线高度检测的困难,提出了一种基于激光光切法的MEMS器件高度在线检测方法.首先建立了用以验证激光光切法有效性的高度在线检测系统;然后提出了一种基于阈值分割、数学形态学、逐行扫描法和加权最小二乘法的快速激光中心线提取算法.实验表明,建立的高度在线检测系统的最大平均误差及误差的均方差分别为-6.38μm和1.87μm,且检测一次高度的时间为1.03 s.因此,激光光切法可以用于MEMS器件高度的在线检测.In order to solve the problem of online height detection during the processing of micro elec- tro mechanical system （MEMS） devices, an online height detection method of MEMS devices based on laser light section was proposed. Firstly, an online height detection system was established to verify the validity of laser light section; secondly, based on threshold segmentation, mathematical morphology, progressive scanning method and weighted least squares method, a fast method for extracting centric line of laser line was proposed. Experimental resuhs show that the maximum mean error and mean square deviation of the online height detection system are -6.38 μm and 1.87 μm, respectively, and the detection time of one height measurement is 1.03 s. So the laser light section can be employed in online height detection of MEMS devices.

关 键 词：MEMS 高度在线检测 激光光切法 图像检测 

分 类 号：TP211.4[自动化与计算机技术—检测技术与自动化装置] TP274[自动化与计算机技术—控制科学与工程]