基于驱动频率的硅微陀螺零偏补偿方法研究  

Research on the Closed-Loop Driving Method of the Silicon Micro-Machined Gyroscope

作　　者：满海鸥 肖定邦[2] 吴学忠[2] 陈志华[2] 侯占强[2] 

机构地区：[1]总装驻常德地区军代室,湖南常德415007 [2]国防科技大学机电工程与自动化学院,长沙410073

出　　处：《传感技术学报》2012年第5期624-627,共4页Chinese Journal of Sensors and Actuators

摘　　要：针对硅微陀螺的零偏受环境温度影响比较敏感的问题,研究了一种新的温度补偿方案。通过研究驱动频率的温度特性,发现驱动频率与温度之间存在很好的线性关系,经过适当的标定,驱动频率可以作为内置温度传感器取代传统的温度传感器,解决了传统传感器温度不准确和测量滞后的问题。建立了驱动频率与零偏的模型,对硅微陀螺的零偏进行了温度补偿验证。验证试验表明,在-40℃～60℃全温区范围内,零偏温度灵敏度由0.053°/(s.℃)提高到0.00244°/(s.℃),有效地改善了全温区的零偏温度系数。A new temperature compensation scheme is investigated in order to reduce the effect of the environment temperature which have great influence to the bias of silicon micro-machined gyroscope.By research on the temperature characteristics of drive frequency,the perfect linear relation between drive frequency and temperature is found.Consequently,with some calibration,the drive frequency can be used as a gauge of the inner temperature of gyroscope chip,which solves the inaccurateness and hysteresis quality of traditional temperature transducer.The model between drive frequency and bias is established and take temperature compensation verification on the bias of silicon micro-machined gyroscope.The experiment shows that bias temperature sensitiveness is advanced from 0.053 °/（s·℃）to 0.00244 °/（s·℃）between-40 ℃ to 60 ℃,which improve the bias temperature coefficient in the whole temperature range.

关 键 词：硅微陀螺 零偏 温度补偿 驱动频率 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]