高线密度X光透射光栅衍射效率  

Diffraction efficiency of high line-density X-ray transmission gratings

作　　者：张文海[1] 曹磊峰[1] 朱效立[2] 谢常青[2] 刘慎业[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]中国科学院微电子研究所,北京100029

出　　处：《强激光与粒子束》2012年第10期2347-2350,共4页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(61107032)

摘　　要：高线密度X光透射光栅是各种高分辨光栅摄谱仪的核心色散元件,为了获得较高的光谱分辨率,工作在2～5keV能区的光谱仪需要使用5000l/mm的X射线透射光栅。为了获得光栅的绝对衍射效率,采用同步辐射光在多个能点对5000l/mm的X光透射光栅进行衍射效率实验标定,通过光栅相对衍射效率拟合获得了光栅结构参数,与光栅结构测量结果非常接近。然后,采用衍射效率的矩形栅线模型,计算得到了光栅的绝对衍射效率。X-ray transmission gratings with high line-density are key components of various high-resolution spectrometers. X-ray transmission gratings with 5000 l/mm are needed to diffract X-rays at 2.0-5.0 keV. To obtain the absolute efficiency of the 5000 l/mm gratings made domestically, the intensity ratio of diffraction peaks was experimentally measured for different energy X-rays radiated from the synchrotron radiation source. The duty cycle fitted by measured data was consistent with that obtained by the electron scanning microscope. Finally, the absolute diffraction efficiency was calculated via the rectangle cross-section mod-el.

关 键 词：透射光栅 衍射效率 实验标定 高线密度 

分 类 号：TL817[核科学技术—核技术及应用]