电子级含氟气体制备技术研究进展  

Production Method of Electronic Grade Fluorinated Gases

作　　者：李盛姬[1] 柳彩波[1] 刘武灿[1] 张建君[1] 

机构地区：[1]浙江省化工研究院有限公司,浙江杭州310023

出　　处：《有机氟工业》2012年第3期38-41,共4页Organo-Fluorine Industry

摘　　要：电子气体是电子工业,特别是大规模集成电路制造不可缺少的材料气体,该产业的发展应与集成电路产业发展同步或超前。电子气体的纯度朝高纯的方向发展是电子气体产业的一个必然方向,这就要求电子气体的分离技术不断进步以满足纯度的要求,以实现市场价值。主要阐述了含氟电子气体制备中较有发展前景的多孔吸附分离技术,主要包括吸附分离工艺及吸附剂,并指出有待于进一步深入研究的内容与方向。Electronic gases are vital to electronic industry, especially very large scale integrate （VLSI） circuit manufacturing industry. The development of electronic gases should be synchronous or ahead of that of integrate circuit. It＇ s inevitable that electronic gases should be of high purity, which needs the separation technology to be improved day by day. In this paper, the application of porous absorption separation in high purity electronic gas production was introduced, including absorption separation processes and absorbents. In addition, many aspects which still need further studies were pointed out.

关 键 词：半导体工业 电子气体 吸附 分离纯化 应用研究 

分 类 号：TQ124.3[化学工程—无机化工]