基于SU-8的微流沟道的设计和制作  

Design and fabrication of micro-flow channel based on SU-8

作　　者：李向红[1] 张斌珍[1] 孟祥娇[1] 范新磊[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《传感器与微系统》2012年第10期94-96,共3页Transducer and Microsystem Technologies

基　　金：国家自然科学基金面上项目(61176115)

摘　　要：以SU—8作为结构材料,采用紫外光刻工艺,尤以斜曝光工艺为主,制造一种新型的、小型化的、低成本的、三维的、高深宽比的微流沟道,微流沟道的高度约为1100μm。初步确定出加工此微流沟道结构所需要的曝光计量、前烘时间、后烘时间和显影时间以及工艺方法,为加工其他尺寸的微流沟道提供参考。基于此方法加工的微流沟道可以应用在微型流式细胞仪上,来提供红细胞计数、血色素浓度、血小板计数和红细胞单元指数等参数。SU—8 is used as stuctural material,UV light photolithography process is adopted,especially inclined exposure technology,a micro-flow channel which is a new type,miniaturization,low cost,three-dimensional structure,high aspect ratio is processed and its height is about 1100μm.Exposure dosage,prebaking time,post-baking time and development time needed by fabrication processing of the micro-flow channel are conformed preliminary to offer a reference for processing micro flow channel in a different size.The micro-flow channel based on this method is used in micro-flow cytometers,can provide many parameters such as red blood cells count,hemoglobin concentration,platelet count and red blood cell index,etc.

关 键 词：微流沟道 SU—8 光刻工艺 斜曝光 三维 高深宽比 

分 类 号：TN23[电子电信—物理电子学]