热膨胀驱动型微阀的设计与制备  

Design and preparation of micro-valve driven bythermal expansion

作　　者：吴元庆[1] 姚素英[1] 

机构地区：[1]天津大学电子信息工程学院,天津300072

出　　处：《传感器与微系统》2012年第10期100-102,共3页Transducer and Microsystem Technologies

摘　　要：利用IntelliSuite软件对热膨胀驱动微阀进行结构分析设计,讨论了微加热器结构等因素对于微阀的影响。利用SU—8胶成型工艺制备了聚二甲基硅氧烷(PDMS)微阀所需要的模具。热膨胀驱动微阀的制备过程分为:薄膜微加热器的金属淀积、阀腔的制备、弹性薄膜的制备和流体通道的制备四部分,详细阐述了各部分的制备工艺流程和各层之间的改性键合工艺等。通过微加工工艺提高了微阀的性能。利用蠕动泵作为流体驱动源,对微阀的性能进行验证,当阀腔驱动电压达到9 V时,实现了微阀关闭。Structure analysis and design on thermal expansion driven micro-valve is carried out,using IntelliSuite software,and effect of factors,such as structure of micro-heater,which influences micro-valve is discussed.The model for PDMS micro-valve is made using SU—8 glue moulding process.The whole process of micro-valve preparation is divided into four parts as metal deposit of thin-film micro-heater,preparation of micro-valve elastic thin film and fluid flow passage,and fabrication process of every part and the bonding technique are stated.The property of micro-valve is improved by microprocessing.Pump is used as driving source of fluid,when the driving voltage of micro-valve reach up to 9V,the micro-valve is closed successfully.

关 键 词：微阀 键合 微电子机械系统 

分 类 号：TN303[电子电信—物理电子学]