粉末溅射SnO_2:Pt薄膜和SnO_2/SnO_2:Pt双层膜的气敏特性  

THE GAS SENSING CHARACTERISTICS OF POWDER SPUTTERING SnO_2:Pt AND SnO_2/SnO_2:Pt FILMS

作　　者：刘文利[1] 高建华[1] 李蕾[1] 

机构地区：[1]山东工业大学数理系,山东济南250014

出　　处：《山东大学学报（自然科学版）》2000年第2期181-186,共6页Journal of Shandong University(Natural Science Edition)

摘　　要：用粉末溅射方法制备了体掺杂型SnO2 :Pt薄膜和表面层掺杂SnO2 /SnO2 :Pt双层膜 .实验结果表明 ,由室温至 2 0 0℃ ,这两种薄膜对CO气体均显示了较高的灵敏度和选择性 .单层膜厚度和双层膜导电层及气敏层厚度对灵敏度有明显的影响 .通过对掺杂单层膜和双层膜气敏特性的比较 ,对粉末溅射SnO2薄膜的气敏响应机理进行了探讨 .Two kinds of bulk doped thin film,a SnO 2:Pt film an d a double layer SnO 2/SnO 2:Pt film were fabricate by powder sputtering meth od.The experimental results showed that both the films were of high sensitivity and good selectivity to CO gas from room temperature to 200 ℃.The gas sensitivi t y of the SnO 2:Pt film strongly depended on the film thickness.The gas sensitiv ity of the SnO 2/SnO 2:Pt double layer film was decided by the thickness of b oth the electric conductance layer and the gas sensing layer.By comparing the ga s sensing characteristics of the two films,the gas sensing mechanism of the SnO 2 thin film was investigated.

关 键 词：气敏器件 粉末溅射 二氧化锡 铂 半导体双层膜 

分 类 号：TN304.21[电子电信—物理电子学] O472.1[理学—半导体物理]