“微电子材料加工原理与技术”课程教学方法初探  

Teaching Method for Lithography Technology in Microelectronics Manufacturing in the Classroom

作　　者：金达莱[1] 王耐艳[1] 王龙成[1] 郭绍义[1] 

机构地区：[1]浙江理工大学机械与自动控制学院,杭州310018

出　　处：《浙江理工大学学报（自然科学版）》2012年第6期912-914,共3页Journal of Zhejiang Sci-Tech University(Natural Sciences)

基　　金：浙江理工大学教改基金(e11133)

摘　　要：针对"微电子材料加工原理与技术"课程多学科交融、知识更新快的特点,选取其中教学重点和难点之一的光刻技术进行教学探讨。结合课程教学的学科基础,采用系统讲授法和范例教学法相结合,以及用多媒体动画、生产实录视频演示等方法弥补课堂讲授之不足,可提高课堂教学效果和学生的学习兴趣,加深学生对多学科知识的综合理解。The course ＂manufacturing mechanism and technology of microelectronics materials＂ con- tains a variety of subject matters, and faces challenges with the rapid updating of professional knowledge. In this paper, lithography technology, one of the major and most difficult parts of the course, is chosen for teaching discussion. In relation to the current discipline status, the oral teaching and example teaching methods are presented as means of improving the effectiveness of classroom teaching, increasing student interest in learning, and helping students have a deeper understanding of multidisciplinary knowledge.

关 键 词：微电子 光刻技术 教学方法 

分 类 号：G642.4[文化科学—高等教育学]