MAO层厚度对MAO/DLC复合膜层力学性能与摩擦学特性的影响  

Growth and Mechanical Property Characterization of Microwave Oxidized MgO/Diamond-Like Carbon Composite Coatings

作　　者：杨巍[1] 汪爱英[1] 蒋百灵[2] 柯培玲[1] 

机构地区：[1]中国科学院宁波材料技术与工程研究所,宁波315201 [2]西安理工大学材料科学与工程学院,西安710048

出　　处：《真空科学与技术学报》2012年第10期878-883,共6页Chinese Journal of Vacuum Science and Technology

基　　金：宁波市自然基金项目(201101A6105005);中科院宁波材料所所长基金项目(Y10317QF09)

摘　　要：借助直流脉冲微弧氧化(MAO)电源,采用恒压模式在AZ80镁合金表面制备四种不同厚度MgO陶瓷层,并以此为基,采用离子束复合磁控溅射技术沉积类金刚石碳(DLC)膜,对比研究了四种膜层体系(MAO-1min/DLC、MAO-3min/DLC、MAO-5min/DLC及MAO-10min/DLC)的表面结构特征、力学性能以及摩擦学性能差异。结果表明:随MAO层厚度增加,复合膜层表面微孔的孔径增大,表面粗糙度增加,且表层DLC膜具有颗粒特征,表现为MAO-3min/DLC及MAO-10min/DLC复合膜层具有较高的纳米硬度和弹性模量,且在磨损过程中对应的摩擦系数与磨痕宽度较小,其抗磨损性能优异;各复合膜层体系在磨损过程中摩擦系数均有波动,产生高温氧化,磨痕表面形成了Fe的转移层;MAO层可提高基体对DLC膜的支撑强度,表层DLC膜对磨损界面具有的润滑作用是复合膜层改善镁基体抗磨损性能之原因所在。The MgO ceramic coatings were deposited by microwave oxidation （MAO） on AZ80 alloy substrates,and covered with the magnetron sputtered, diamond-like carbon （DLC） films. The impacts of the deposition conditions, such as the MgO thickness,substrate temperature,and sputtering power, on the microstructures and mechanical properties of the coating were evaluated with scanning electron microscopy and conventional mechanical probes. The results show that the MgO thickness strongly affects the surface roughness and the mechanical properties. For instance, as the MgO thickness increased, the surface roughened with increased size of pore, and with improved mechanical properties, including the nanohardness, elastic modulus, wear-resistance and friction coefficiem. Besides, the MgO coating enhanced the interfacial adhesion of DLC coating, which lubricates the object surface. Possible mechanisms were also tentatively discussed.

关 键 词：镁合金 微弧氧化 厚度 类金刚石碳膜 性能 

分 类 号：TG146.2[一般工业技术—材料科学与工程]