图形反转剥离工艺用于复合含能点火桥膜的制备  

Image Reversal Lift-off Process for Fabrication of Energetic Multilayer Ignition Bridge Films

作　　者：王成玲[1] 叶迎华[1] 沈瑞琪[1] 杨程[1] 余协正[2] 朱莹[1] 

机构地区：[1]南京理工大学化工学院,江苏南京210094 [2]北京动力机械研究所,北京100074

出　　处：《火工品》2012年第4期1-5,共5页Initiators & Pyrotechnics

摘　　要：为了制备高点火能力的复合含能桥膜,对图形反转剥离工艺进行研究,发现其倒梯形的光刻胶剖面有利于制备高精度的厚膜图形。以Ti为过渡层,在Si3N4/Si基底上成功制备出线宽80μm、厚度2μm的W型Ni/Al多层复合含能桥膜,形状完整清晰;SEM和EDS分析表明,桥膜表面晶粒均匀,成分稳定。采用高速摄影仪分别拍摄了等尺寸、等厚度的Al桥膜、Ni桥膜和Ni/Al复合桥膜在100μF电容(140V充电电压)放电下的无药点火情况,发现Ni/Al复合桥膜反应迅速,火焰喷射面积更大,并能抛撒出大量火花,且持续时间最长。Image reversal lift-off process, which is used to fabricate energetic composite bridge films with high ignition ability, was studied. The inverted trapezoid profile of the photoresist is found to be beneficial to fabricating thick film graphic of high accuracy. W-shaped Ni/Al energetic multilayer bridge films, whose linewidth is 80pro and thickness is 2pro, were successfully fabricated on Si3/N4/Si substmte with Ti as interlayer, and appeared to be in complete distinct shape. The SEM graph and EDS spectra displayed the uniform crystal grains and stable composition on the surface of the bridge films. Three kinds of bridge films （Al, Ni, Ni/Al） of same size and thickness were ignited without propellant under the capacitor discharge of 100 μ F （charging voltage is 140V）, and the flame images were collected by high speed photography. The results indicate that the Al-Ni rnultilayer bridge films possess the characteristics of rapider response, larger area of jet flame, sputtering out a great deal of sparkle, and the longest duration.

关 键 词：MEMS 图形反转 剥离 含能桥膜 点火 

分 类 号：TQ560.6[化学工程—炸药化工]