铁电-硅集成微麦克风和扬声器的理论设计  

Theoretical Design of Ferroelectrics-silicon Integrated Microphone and Microspeaker

作　　者：任天令[1] 张林涛[1] 刘理天[1] 李志坚[1] 

机构地区：[1]清华大学微电子所,北京100084

出　　处：《压电与声光》2000年第4期234-236,共3页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目!(69806007)

摘　　要：在现有 Ｐｂ（Ｚｒ，Ｔｉ）Ｏ３（ＰＺＴ）铁电薄膜的制备工艺基础上，提出并设计了可集成在同一芯片上的基于ＰＺＴ铁电薄膜的压电型微麦克风、扬声器结构，对其灵敏度和声输出进行了理论计算。比较了基于 ＰＺＴ和 ＺｎＯ两种材料的微麦克风和扬声器的性能差异。Based on the fabrication process of PZT thin films, a kind of integrated piezoelectric microphone and microspeaker is presented. The structure parameters were theoretically optimized, and the sensitivity and output sound pressure of this device were calculated. Differences between PZT and ZnO microphone and microspeaker were compared.

关 键 词：微麦克风 微扬声器 铁电薄膜 硅 设计 

分 类 号：TN643.02[电子电信—电路与系统]