MEMS陀螺中带孔结构空气阻尼建模分析  

Modeling and Analysis of the Air Damping for Perforated Structures in MEMS Gyroscopes

作　　者：李锡广[1] 李孟委[1,2] 王莉[1,2] 崔敏[1] 刘俊[1,2] 

机构地区：[1]中北大学电子测试技术重点实验室,太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《微纳电子技术》2012年第11期749-754,766,共7页Micronanoelectronic Technology

基　　金：重点实验室基金资助项目(9140C120402110C1201);山西省自然基金资助项目(2011011013-1);科学院基金资助项目(62201070128)

摘　　要：针对MEMS陀螺中带孔结构的空气阻尼问题,根据制作的微陀螺,利用MATLAB软件对模态匹配、Q值匹配与灵敏度之间的关系进行了仿真分析。仿真结果表明在驱动和检测模态匹配时灵敏度幅值最大,但工作带宽却随Qx与Qz乘积的增大而减小。建立了空气阻尼计算模型,并利用实验测试数据对空气阻尼计算模型进行了分析和检验。研究发现,微陀螺在驱动方向上,带孔平板结构的滑膜空气阻尼计算模型存在一定误差,经过系数修正后Q值的理论值与测试值具有较好的一致性,但仍需要进一步地修正和完善;在检测方向上,压膜空气阻尼模型比较准确,精度较高能控制在5%以内,可直接用于微陀螺的空气阻尼设计中。To solve the problem of air damping for perforated structures in MEMS gyroscopes,the relations between the modal match,Q value match and sensitivity were simulated and analyzed by the mathematics tool software MATLAB based on a designed MEMS gyroscope.The simulations results reveal that the sensitivity has the largest amplitude when the drive modal matches with the detection modal,but the operation bandwidth decreases with increasing product of Qx and Qz.The air damping calculation model for the MEMS gyroscope was established.The model was analyzed and tested by the experiment data.The research shows that there are some errors in the slide-film air damping model of the MEMS gyroscope perforated structures in the driven direction.The better consistency can be obtained between the theoretical value and test value of Q value after coefficient correction,but it needs to be further improved and optimized.The squeeze-film air damping model of perforated structures in the detection direction is proved to be more accurate,the precision is less than 5%,and the result can be directly used in the air damping design for MEMS gyroscopes.

关 键 词：微电子机械系统(MEMS) 陀螺 空气阻尼 Q值匹配 工作带宽 

分 类 号：TH703[机械工程—仪器科学与技术]