微惯性测量单元的减振结构设计与仿真分析  

Design and simulation analysis on vibration attenuation structure of MIMU

作　　者：李承斌[1] 尤政[1] 张高飞[1] 赵嘉昊[1] 

机构地区：[1]清华大学精密仪器与机械学系精密测试技术及仪器国家重点实验室,北京100084

出　　处：《传感器与微系统》2012年第11期77-80,83,共5页Transducer and Microsystem Technologies

摘　　要：基于谐振式MEMS陀螺的微惯性测量单元(MIMU),在工作时其性能会受到来自内部与外部振动干扰的影响。在分析了影响MIMU性能的振动来源和传统减振方式的不足的基础上,提出一种基于阻尼合金的新型减振方案和相应的MIMU结构设计,并设计了仿真实验分析其力学性能和阻尼衰减特性。结果表明:采用该阻尼合金的方案,MIMU减振结构的各项力学指标均符合要求,并且具有良好的减振抗干扰特性。The performance of a micro inertial measurement unit（MIMU） based on resonant gyroscope is influenced by external and internal vibration interference.On the basis of analyzing vibration sources and disadvantages of traditional vibration attenuation methods,a new damping solution based on damping alloy and design of MIMU structure is proposed.Simulation experiments are designed to analyze the mechanical properties and damping attenuation characteristics.Results show that the solution based on damping alloy can meet requirements of the system,and it has good vibration attenuation and anti-interference ability.

关 键 词：微惯性测量单元 阻尼合金 减振 结构设计 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]