衍射光栅刻划机的闭环控制系统  

Closed-loop control system for diffraction grating ruling machine

作　　者：蔡锦达[1] 王英[1] 颜廷萌[2] 秦绪祥[1] 王亮[1] 

机构地区：[1]上海理工大学机械工程学院,上海200093 [2]大连理工大学机械工程学院,辽宁大连116024

出　　处：《光学精密工程》2012年第11期2416-2423,共8页Optics and Precision Engineering

基　　金：2012国家重大科学仪器设备开发专项资助项目(No.2011YQ150040);2011年上海市重大技术装备研制专项资助项目2B-ZB(No.ZB-ZBYZ-03-11-1709);上海市教委重点学科资助项目(No.J50503)

摘　　要：以S3C2440A为控制核心,设计了衍射光栅刻划机的高精度运动控制系统,实现了现场显示、实时控制等功能。用S3C2440A微控制器控制伺服电机和步进电机完成光栅刻划的分度运动和刻划运动,通过SiGNUMTM RELM直线光栅尺反馈和PD加前馈控制算法补偿由于惯性等原因造成的分度误差,并用MATLAB对使用PD加前馈控制算法的分度运动进行仿真。采用RON225增量式角度编码器反馈以补偿执行刻划运动的步进电机因失步造成的误差,通过分析和处理实验数据获得分度运动最佳速度和伺服电机在此分度运动速度下停止时的过冲距离。最后,对可能产生控制误差的原因进行了初步分析,并提出了需要进一步改进和完善之处。The high accurate control system for a diffraction grating ruling machine was designed by taking the S3C2440A as a control core to implement the real-time shows, real-time control and other functions. The S3C2440A micro controller was used to control a servo motor and a stepping motor to complete the indexing movement and the ruling movement of the grating ruling, the SiGNUMTM RELM straight line grating feedback and PD plus feedforward control algorithm were taken to compen- sate the index error caused by the inertia and other reasons, then the indexing movement using PD plus feedforward control algorithm was simulated by MATLAB. Furthermore, the error caused by the out-of- step of stepping motor was compensated by the feedback of a RON225 incremental angle encoder, and the best speed of the indexing movement and the overshoot distance of the servo motor when it stopped were collected by the analysis and the process of the experimental data. Finally, the analysis on the controlling error was introduced, and how to improve the system in further was put forward.

关 键 词：衍射光栅 刻划机 运动控制 S3C2440A 刻划光栅 PD加前馈控制 

分 类 号：TG63[金属学及工艺—金属切削加工及机床] O436.1[机械工程—光学工程]