压电叠堆位移放大致动器的动态特性  

Dynamic characteristics of a piezoelectric-stack displacement-amplifying actuator

作　　者：靳宏[1,2] 金龙[1,2] 徐志科[1,2] 吴明清[1,2] 鲍诗杰[1,2] 

机构地区：[1]东南大学伺服控制技术教育部工程研究中心,南京210096 [2]东南大学电气工程学院,南京210096

出　　处：《振动与冲击》2012年第21期146-151,共6页Journal of Vibration and Shock

基　　金：国家自然科学基金资助项目(51177014;51077011)

摘　　要：为了准确掌握压电叠堆位移放大致动器的动态特性,本文利用谐响应分析、阻抗测试法和动态投影栅线法对其进行分析研究。首先,使用ANSYS分析软件对放大机构的模态和位移随频率变化情况进行有限元分析。然后,运用压电陶瓷的阻抗测试法,对这一压电致动器的阻抗特性进行测量分析。最后通过动态投影栅线法对压电致动器的通放电位移状况进行测量分析。实验结果表明:位移放大机构的谐响应频率为1 724 Hz,能提供较大的输出力矩;压电致动器的谐振频率为8.3 kHz左右,反谐振频率为8.75 kHz左右,它的工作最快响应时间在0.3 ms以内;它能在0.5 ms内完成位移的突变,位移波动小于5μm,且位移量随电压值呈线性变化;放电时的动态位移过程平稳。因此,这一压电致动器具有响应速度快,位移波动小、线性度好、精度高,输出力矩大等较好的动态响应特性,能被广泛应用于各种需要响应快、精度高、位移大的微位移控制驱动系统中,其应用前景值得期待。In order to find out the dynamic charactenstics of a piezoelectric-stack displacement-amplifying actuator, three methods of harmonic response analysis, impedance test and dynamic grating projection were used. Firstly, ANSYS software was used to analyze its modes and displacements varying with frequency. The method of impedance test was employed to measure its resonance frequencies. Finally, the method of dynamic grating projection was used to measure its displacement status of charge and discharge. Experimental results indicated that the natural frequency of the displacement- amplifying mechanism is 1 724 Hz, it can provide large output torque ; the resonance frequency of this kind of piezoelectric actuator is 8.3 kHz, its reverse resonance frequency is 8.75 kHz, its fastest response time is less than 0.3 ms; its displacement mutation time is less than 0.5 ms, its displacement fluctuation is less than 5 p^m, and its displacement change vs. voltage is linear; its dynamic displacement is smooth, when discharging. After analyzing, it was shown that rapidly responding, tiny displacement fluctuations, fine displacement linearity, higher precision, and large output torque, etc. are its dynamic characteristics. Therefore it could be applied in many micro-displacement control and drive systems. So, it had good application prospects.

关 键 词：压电叠堆 位移放大 致动器 动态特性 

分 类 号：TN384[电子电信—物理电子学]