凹面光栅衍射效率的研究进展  

Progress of the concave grating diffraction efficiency

作　　者：李亭[1] 黄元申[1] 李柏承[1] 张大伟[1] 刘海涛[1] 陶春先[1] 凌进中[1] 倪争技[1] 

机构地区：[1]上海理工大学,上海200093

出　　处：《光学技术》2012年第6期718-724,共7页Optical Technique

基　　金：国家自然科学基金(60908021);国家科技支撑计划(2011YQ15004002;2011YQ15004003;2011YQ15004004;2011YQ14014704);上海市纳米专项(1052nm07100)

摘　　要：凹面光栅因同时具有聚焦和色散功能而广泛应用于各类紫外、可见和红外波段的光谱分析仪器中,尤其是平场凹面光栅可以结合线阵或面阵探测器来实现即时分析。凹面光栅衍射效率的高低直接影响光谱仪器的信噪比和信号采集,其相关研究也逐渐为人们所关注。介绍了凹面光栅衍射效率的研究进展,比较了由机械刻划法和全息法制作的凹面光栅在掠入射下衍射效率的差别,分析了现有计算衍射效率方法的优缺点,并且对凹面光栅衍射效率的研究趋势做了简要预测,提出了需要同时在凹面光栅的主截面和非主截面内考虑光束对其衍射效率的影响。Since the good self-focusing and dispersion properties, concave gratings are widely used in the varieties of ultraviolet, visible and infrared spectroscopy instruments. The flat field concave gratings can be combined with the linear array or the area array detector to be used in the rapid real-time analysis. The diffraction efficiency of concave gratings di- rectly affect the signal-to-noise ratio and the signal acquisition of the spectral instruments, and the relevant research about the concave gratings are gradually concerned. The progress of the concave grating diffraction efficiency is described. Firstly, the diffraction efficiency of ruled concave gratings is compared with that of holographic concave gratings at graz ing incidence. Secondly, the advantages and disadvantages of several calculation methods about diffraction efficiency are analyzed. Finally, the research trend of the concave grating diffraction efficiency is briefly predicted： the diffraction effi- ciency in both main cross-section and noncross-section should be considered when it is calculated.

关 键 词：凹面光栅 衍射效率 菲涅耳衍射 数值积分法 

分 类 号：TN43[电子电信—微电子学与固体电子学] TN23