一种高指向性MEMS声矢量传感器结构设计与分析  

The Structural Design and Analysis of A MEMS Acoustic Vector Sensor with High Directivity

作　　者：刘振亚[1] 苑伟政[1] 邓进军[1] 任森[1] 马骋宇[1] 

机构地区：[1]西北工业大学陕西省微/纳米系统重点实验室,陕西西安710072

出　　处：《压电与声光》2012年第6期890-893,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然基金资助项目(50775189)

摘　　要：设计了一种高指向性微机电系统(MEMS)声矢量传感器,结构采用了硅-玻璃(SOG)工艺,增大流体间隙,减小振动阻尼,并利用ANSYS软件分析了流体间隙对指向性的影响,以验证结构的高指向性。结果表明,在流体间隙从5μm增大到30μm时,振动振幅增大30倍,相位差最高增大126°,当入射角度变化量为80°时,相位差变化量增大了40°,传感器指向性得到了显著提高。此种设计有助于促进声矢量传感器的发展。Abstraet： A MEMS acoustic vector sensor with high directivity was designed. The structure employed SOG technique to increase fluid gap and decrease vibration damping, and the ANSYS software was used to analyze the influence of the fluid gap on the directivity. The high directivity of the structure has been verified. The result of simulating calculation showed that when the fluid gap changed from 5 μm to 30μm, the amplitude increased to about 30 times, and the phase difference increased by 126° maximally; when the variable quantity of the incident angle was 80°, the phase difference increased to 40°, and the directivity and the sensitivity were enhanced evidently. The design was conducive to the development of the acoustic vector sensor.

关 键 词：高指向性 微机电系统 声矢量传感器 流体间隙 相位差 

分 类 号：TB525[理学—物理]