电清洗人造石英晶体技术的研究  

Sweeping Quartz Crystals

作　　者：漆婷[1] 李和新[1] 谢克诚[1] 李建芝[1] 石自彬[1] 蒋春键[1] 

机构地区：[1]中国电子科技集团公司第26研究所,重庆400060

出　　处：《压电与声光》2012年第6期915-916,共2页Piezoelectrics & Acoustooptics

摘　　要：该文采用电清洗技术研制出高稳定性,高可靠性,低腐蚀隧道密度的人造石英晶体。通过对电清洗工艺技术的研究,可将腐蚀隧道密度≤100条/cm2、Na+质量分数为2.33×10-6的石英晶体腐蚀隧道密度降低到≤10条/cm2,Na+质量分数减少到0.3×10-6。采用电清洗石英晶体技术研制出了腐蚀隧道密度≤3条/cm2,抗辐射性能提高2个数量级。We have acquired high stable, high dependable, low etch-channel density quartz crystals through the sweeping technique in this work. The sweeping process can reduce Na＋ impurities from 2.33 × 10^-6 to 0. 3 × 10^-6 , reduce etch-channel density from ≤100/cm^2 to ≤10/cm^2. By using the proposed sweeping process , the quartz crystals with etch-channel density≤3/cm^2 have been prepared,and the antiadiation excellent has been improved by 2 order of magnitudes.

关 键 词：电清洗 石英晶体 低腐蚀隧道密度 Na+含量 抗辐射性能 

分 类 号：TN384[电子电信—物理电子学]