振动式微陀螺正交误差自补偿方法  

The Self-Compensation Method for Eliminating Quadrature Error of the Vibratory Micro-Gyroscope

作　　者：刘学[1] 陈志华[1] 肖定邦[1] 吴学忠[1] 苏剑彬[1] 侯占强[1] 贺琨[1] 

机构地区：[1]国防科学技术大学机电工程与自动化学院,长沙410073

出　　处：《传感技术学报》2012年第9期1221-1225,共5页Chinese Journal of Sensors and Actuators

基　　金：基于弹性波传递效应的杯型波动陀螺设计理论及制造技术研究(51005239);基于多构型微热驱动阵列的MEMS器件稳定性提升机理与方法研究(51175506)

摘　　要：微陀螺正交误差会影响陀螺的零偏稳定性,为了提高微陀螺的性能,必须减小正交误差。针对正交误差处理中存在的问题,推导了包含交叉耦合误差效应的驱动模态和检测模态的动力学方程,研究了交叉耦合误差引起的正交误差表达式,提出了一种正交误差闭环控制自补偿方法。通过将经正交误差幅值调幅控制的驱动位移信号闭环反馈作用到检测模态的输出,实现正交误差的自补偿。制作PCB电路测试了微陀螺的性能。正交误差自补偿后微陀螺零偏输出均值从778 mV减小到了2 mV,零偏稳定性从75°/h提高到了34.5°/h。实验结果表明,此方法是可行的。The quadrature error results in poor zero bias stability,to improve the performance of the micro-gyroscope the quadrature error must be reduced.The kinetic equation contains the cross-coupling error in drive-mode and sense-mode were introduced,the expressions of the quadrature error induced by the cross-coupling were analyzed.A simple,yet effective approach to suppress the quadrature error was presented.The amplitude of the quadrature error had been picked up to amplitude modulate the displacement of the drive-mode,then it is injected into the output of the sense-mode,thus the quadratura error can be self-compensated.Experimental results show that the proposed solution decreases the zero bias output from 784 mV to 2 mV and increases the stability of zero bias from 75°/h to 34.5°/h.

关 键 词：微机电系统 正交误差 自补偿 振动式微陀螺 交叉耦合 

分 类 号：TN492[电子电信—微电子学与固体电子学]