紫外胶在聚合物准矩形电光波导中的应用  

Application of Ultraviolet Photo-Resist in Polymeric Quasi-Rectangle Electro-Optical Waveguide

作　　者：岳远斌[1] 王希斌[1] 孙健[1] 张琨[1] 孙小强[1] 张大明[1] 

机构地区：[1]吉林大学电子科学与工程学院集成光电子学国家重点联合实验室吉林大学实验区,吉林长春130012

出　　处：《光学学报》2012年第12期244-247,共4页Acta Optica Sinica

基　　金：国家自然科学基金(61077041;6117027;61107019);吉林省科技发展计划(20110315);吉林省青年科研基金(20100174);吉林大学基本科研业务费专项(201100253;201103071);中国博士后基金(2011M500597;2012M510900);集成光电子学国家重点联合实验室开放课题(IOSKL-KFKT-11)资助课题

摘　　要：基于聚合物材料的波导型电光器件对提升光通信网络的带宽容量具有重要的意义。设计并制备了一种基于有机/无机杂化非线性材料的准矩形聚合物电光波导,采用SiO2作为下包层,紫外胶SU-8作为引导芯层,掺有生色团DR1的有机/无机杂化非线性材料DR1/SiO2-TiO2作为电光层,通过优化感应耦合等离子体刻蚀工艺的天线功率、偏置功率和氧气流量,将SU-8同时作为引导芯层和刻蚀工艺的掩模,制备了准矩形电光波导。实验测得波导传输损耗为-3.5dB/cm。The polymer waveguide electro-optic （EO） devices play a key role in improving the optical network bandwidth and capacity. A quasi-rectangle EO waveguide based on organic/inorganic hybrid material （OIHM） is designed and fabricated. SiO2 is adopted as the lower cladding. The ultraviolet photo-resist SU-8 is used as the guiding core. The chromophore of dispersed red 1 （DR1） doped OIHM is used as the EO active layer. Through optimizing the parameters including antenna power, biasing power and 02 flow rate of inductively coupled plasma （ICP） etching, SU-8 can be applied as the guide core and etching mask at the same time. By the traditional semiconductor processes, the quasi-rectangle EO waveguide device is successfully fabricated. Under this condition, the transmission loss is -- 3.5 dB/cm.

关 键 词：非线性光学 准矩形波导 感应耦合等离子体刻蚀 SU-8 

分 类 号：TN405.982[电子电信—微电子学与固体电子学]