纳米膜隧穿效应微陀螺的结构设计与加工  

Structure Design and Fabrication of Micro-Machine Gyroscope Based on Nano-Films with Tunneling Effect

作　　者：李锡广[1,2] 李孟委[1,2] 杜康[1] 郑伦贵[2] 刘俊[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术重点实验室,太原030051

出　　处：《半导体技术》2013年第1期10-15,共6页Semiconductor Technology

基　　金：山西省自然科学基金(2011011013-1);重点实验室基金资助(9140C120402110C1201);科学院基金(62201070128)

摘　　要：基于GaAs材料和器件的制造工艺,介绍了纳米膜隧穿器件和微陀螺的结构设计方法和工艺加工方法。阐述了基于纳米膜隧穿效应微陀螺的工作原理,对纳米膜隧穿器件和微陀螺的结构进行了设计,分析了微陀螺的模态频率设计和匹配仿真。采用反应离子刻蚀(RIE)刻蚀和感应耦合等离子体(ICP)刻蚀方法分别对隧穿器件和微陀螺结构进行了加工,利用扫描电镜观测,加工结果较好。利用冲击信号测试了微陀螺的频率响应,讨论了微陀螺的模态频率测试结果和匹配情况,证明微陀螺在驱动方向和检测方向上能够工作且模态频率匹配程度较好。实验结果表明,提出的GaAs材料微陀螺结构设计方法和工艺加工方法是可行的,能够应用于GaAs基微陀螺结构设计与制造。Based on the fabricating process of GaAs material and device, the structural design and processing methods of nano-films tunneling device and micro gyroscope were introduced. The operating principle of the micro-machine gyroscope based on nano-films with tunneling effect was expounded, and structures of nano-films tunneling device and micro gyroscope were designed. Structural analysis and design of nano-films tunneling device and micro gyroscope were presented, and the modal frequency match was simulated. The nano-films tunneling device and micro gyroscope were fabricated by the reaction ion etching （RIE） and inductively coupled plasma （ICP） etching technology. A higher quality structure was obtained by using SEM. The frequency response of device was tested by impact signal measuring experiment. The test results and matching situations of micro gyroseope＇s modal frequency were discussed. The results show that the gyroscope works well in driven and detection direction, and has a well modal frequency matching. The research shows that the structural design and processing methods of micro gyroscope based on GaAs material described are feasible, and can be applied to the design and fabrication of GaAs-based micro gyroscope.

关 键 词：隧穿效应 微机械陀螺 模态匹配 MEMS加工 砷化镓 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]