多对流耦合环境下Cz-Si固液界面形态的仿真方法及控制参数研究  

Study on Solid-liquid Interface Morphology Simulation Method and Control Parameters of Cz-Si under Multi-stream Coupled Environment

作　　者：姜雷[1] 刘丁[1] 赵跃[1] 刘志尚[1] 

机构地区：[1]西安理工大学国家联合晶体生长设备及系统集成工程研究中心,西安710048

出　　处：《人工晶体学报》2012年第6期1762-1767,共6页Journal of Synthetic Crystals

基　　金：国家科技重大专项(2009ZX02011001);国家自然科学基金(61075044)

摘　　要：固液界面形态是各种晶体生长研究的关键,固液界面形态问题是一个移动边界问题。然而在Cz-Si系统中,移动边界问题又与对流耦合,尤其是与晶体旋转所引起的强迫对流直接耦合,构成了含有第三方耦合因素的移动边界问题。本文提出一种基于FVM的迭代法解决此问题,对多流耦合环境下的固液界面形态进行了仿真和研究,分析了晶体旋转对界面形态的影响。最终将仿真结果与采用快速提离法在实践中获得的界面形态进行对比,取得了一致性。The problem of solid-liquid interface morphology which plays an important role in crystal growth is a moving boundary.Whereas coupled with melt convection especially directed with forced convection caused by crystal rotation,moving boundary problem is composed of factors that contain third-party coupling in Cz-Si system.Based on FVM,an iterative solution method is proposed under multi-stream coupled environment through simulation to solid-liquid interface morphology and an analysis method is given to research on crystal rotation impact on interface morphology in this paper.Different from the most simulation results,this paper compared simulation results with the true interface morphology which is obtained by quick lift-off method in practice.By comparing the test,simulation results consistent test well.

关 键 词：直拉硅单晶 固液界面形态 迭代法 移动边界 

分 类 号：TB303[一般工业技术—材料科学与工程]