双T型MEMS仿生矢量水听器的设计与测试  

Design and test for a double T-shape MEMS bionic vector hydrophone

作　　者：刘林仙[1,2] 张国军[1,2] 许姣[1,2] 张文栋[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,太原030051 [2]中北大学电子测试技术重点实验室,太原030051

出　　处：《振动与冲击》2013年第2期129-134,共6页Journal of Vibration and Shock

基　　金：水陆交通安全传感器及系统(2011AA040404)

摘　　要：根据当前声纳系统的需求,以MEMS技术为依托,结合仿生原理、压阻原理,提出了一种双T型矢量水听器。在分析T型梁结构力学特性的基础上,详细介绍了两种不同尺寸微结构的设计、加工和测试。采用ANSYS软件仿真,得出两种微结构的谐振频率分别为1 993.3 Hz和10.17 kHz;利用MEMS加工工艺加工出水听器微结构并对水听器进行了封装;采用振动台标定和水下驻波场测试相结合的方法完成了水听器的测试。测试结果表明两种结构的双"T"型矢量水听器灵敏度达到-180 dB和-192 dB(1 kHz,0 dB参考值1 V/μPa),具有良好的"8"指向性,矢量特性明显,动态范围为90.48 dB(315 Hz)。In view of the demand of current sonar systems, a novel double T-shape vector hydrophone was proposed based on piezoresistive effect, bionic principle and MEMS technology. Based on mechanical properties analysis of the T- shape beam, design, simulation, fabrication and test of double T-shaped vector hydrophones with two different sizes were described. The microstructure of the hydrophone was statically simulated with ANSYS, and the first-order resonance frequencies of the two microstruetures were 1993.3Hz and 10.17 kHz, respectively. The microstructure of the hydrophone was manufactured with MEMS technology and was encapsulated. The hydrophone was measured using a shaking table and an underwater standing wave field. The test results showed that their receiving sensitivity is up to -180dB and -192dB at 1 kHz （0dB ^= 1V/μPa）, their dynamic range is 90.48 dB and the two vector hydrophones possess a good ＂8＂ directional pattern.

关 键 词：MEMS 仿生 矢量水听器 双T型 ANSYS 

分 类 号：TP565.1[自动化与计算机技术]