轴向磁场下多晶硅铸造过程的仿真模拟  

Simulation on Polysilicon Casting Process Under Axial Magnetic Field

作　　者：罗玉峰[1,2,3] 袁文佳[1] 张发云[2,3] 胡云[2,3] 彭华厦[1,3] 

机构地区：[1]南昌大学机电工程学院,江西南昌330031 [2]新余学院新能源科学与工程学院,江西新余338004 [3]江西省高等学校硅材料重点实验室,江西新余338004

出　　处：《铸造技术》2013年第1期61-64,共4页Foundry Technology

基　　金：国家自然科学基金资助项目(项目编号:51164033);江西省教育厅科技项目(11739);校级招标课题xj0901

摘　　要：利用多物理场耦合分析软件COMSOL Multiphysics4.2对多晶硅铸造过程进行模拟仿真,得到轴向磁场作用下多晶硅定向生长过程中的流场和温度场分布,以及磁场对坩埚内流场和温度场的影响,并分析了磁场作用机理,为磁场在多晶硅生产中的应用提供了参考依据。The casting process of polycrystalline silicon was simulated by multi-physics coupling field analysis software COMSOL Multiphysics 4.2, the distribution of flow field and temperature field in polysilicon directional growth process and the effects of magnetic field on the flow field and temperature field within the crucible were obtained under axial magnetic field. The action mechanism of magnetic field was analyzed, which provided the reference and basis for the application of magnetic field in polycrystalline silicon production.

关 键 词：轴向磁场 多晶硅 数值模拟 流场 温度场 

分 类 号：TQ127.2[化学工程—无机化工]