YAG晶体功能薄膜制备  

Manufacture of functional coating on YAG crystal

作　　者：陈松林[1] 马平[1] 刘志超[1] 王震[1] 潘峰[1] 吴倩[1] 罗晋[1] 

机构地区：[1]成都精密光学工程研究中心,四川成都610041

出　　处：《红外与激光工程》2012年第12期3318-3322,共5页Infrared and Laser Engineering

基　　金：国家高技术课题(8042022A)

摘　　要：采用电子束蒸发方法制备Nd:YAG晶体板条功能薄膜,理论设计并镀制具有倏逝膜功能的宽带泵浦光减反膜(808 nm HT)和具有谐波功能的双色膜(808 nm HR,1 064 nm HT)。实验表明:大角度使用条件下的双色膜通带波纹加剧是导致其光谱性能下降的主要原因,同时比较了不同工艺下膜层应力对薄膜开裂的影响,使用应力缓冲层技术抑制了薄膜老化过程中裂纹的形成和扩展。激光损伤测试结果表明双色膜的单脉冲损伤阈值大于5.6 J/cm2(1 064 nm,5 ns,1-on-1),连续激光损伤阈值大于500 kW/cm2(1 064 nm),原子力显微镜分析证实初始损伤源主要来自膜层及其界面的点状吸收缺陷。In this article the author focuses on the manufacturing of functional coating on Nd： YAG crystal plate with electrical beam evaporation, and on the theoretical design of wide-band bump-beam anti-reflection coating （808 nm HT） as evanescent film and dichroic coating （808 nm HR, 1 064 nm HT）. The experiment showed that the main reason for the spectral performance degradation of dichroic coating lay in the increase of ripple vibration in large angle of incidence. Meanwhile, comparisons had been made to identify the impact of film layer stress leading to film cracking with different manufacturing methods. Therefore, stress-buffer layer technique had been adopted to prevent the formation and expansion of cracking during the aging process of films. The result of laser damage test indicates that single pulse damage threshold of dichroic coating （808nm HR, 1064nm HT） was more than 5.6J/cm^2 （1 064nm, 5ns, 1-on-l） and continuous laser damage threshold was more than 500 kw/cm^2 （1 064 nm）, primary damage source testified by AFM had been caused mainly by absorbing point defects of layers and interface.

关 键 词：薄膜光学 双色膜 薄膜应力 YAG晶体 激光损伤 

分 类 号：O484.1[理学—固体物理]