圆筒电极对离子磁电加热的影响  

Effect of cylinder-electrode on magnetoelectric heating of ions

作　　者：马志斌[1] 沈武林[1] 吴俊[1] 严垒[1] 汪建华[1] 

机构地区：[1]武汉工程大学材料科学与工程学院,湖北省等离子体化学与新材料重点实验室,武汉430073

出　　处：《物理学报》2013年第1期245-250,共6页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:10875093)资助的课题~~

摘　　要：高效的磁电加热不仅能够提高电子回旋共振(ECR)等离子体的离子温度,还能改善离子的径向和轴向分布,促进ECR等离子体在化学气相沉积金刚石膜刻蚀中的应用.将磁电加热系统中的圆环电极改进为圆筒电极,研究了圆筒电极对离子磁电加热的影响,对比了圆筒和圆环电极加热离子的区别.结果表明:在同一阳极偏压下,圆筒比圆环电极更有利于提高离子温度,圆筒电极加热时各径向位置的离子温度升高的幅度较大,其中圆筒电极内部的离子温度径向分布差异较大,而圆筒下游的离子温度径向分布比较均匀;磁电加热对离子密度的影响很小;采用圆筒电极加热时,有利于离子向轴向下游的输运,改善了离子的轴向均匀性.A highly-efficient magnetoelectric heating not only improves ion temperature of electron cyclotron resonance （ECR） plasma, but also reforms the radial and axial distribution of ions, thereby promoting the application of ECR plasma to the etching of chemical vapor deposition diamond films. In this paper, a ring-electrode is replaced by a cylinder-electrode, and the effects of cylinder-electrode on the ion temperature and density are studied. The ion heating effects in the cases of cylinder-electrode and ring-electrode are compared. The results indicate that cylinder-electrode can produce higher ion temperature than ring-electrode at the same anode voltage. Ion temperature at each radial point changes a lot when the cylinder-electrode is used to heat ions. The ion temperature inside cylinder-electrode has a big radial variation while it has a good radial uniformity at downstream of cylinder-electrode. The effect of magnetoelectric heating on ion density is small. Using cylinder-electrode to heat ion is beneficial to the transport and axial uniformity of ions.

关 键 词：ECR等离子体 磁电加热 离子温度 

分 类 号：O53[理学—等离子体物理]