单片集成MSM/HEMT长波长光接收机  

Monolithically Integrated MSM/HEMT Long-wavelength Phot oreceiver

作　　者：敖金平[1] 曾庆明[1] 赵永林[1] 李献杰[1] 蔡克理[1] 刘式墉[2] 梁春广[1] 

机构地区：[1]河北半导体研究所,石家庄050051 [2]吉林大学电子工程系,长春130023

出　　处：《光电子．激光》2000年第3期241-243,共3页Journal of Optoelectronics·Laser

基　　金：国家"八六三"计划资助项目![863 -3 0 7-0 6-0 2 ( 0 3 ) ]

摘　　要：本文介绍了利用 In Ga As金属 -半导体 -金属 (MSM)长波长光探测器与 In Al As- In Ga As高电子迁移率晶体管 (HEMT)单片集成来实现长波长光接收机的材料和电路设计、工艺途径等研究工作 ,基本解决了两种器件集成的工艺兼容性的问题 ,实现了 1.3Gb/ s传输速率的单片集成长波长光接收机样品。This paper presents the work inclu dintg the material and circuit design,the process ot realizing long-wavelength ph otoreceiver by monolithically integrated InGaAs metal-semiconductor-metal (MSM ) photodetector and InAlAs-InGaAs High Electron Mobility Transistor (HEMT).The process compatibility for integrating the two kinds of devices has been done a lmost well and the sample with transmitting rate of 1.3 Gb/s has been obtained.

关 键 词：MSM光探测器 光接收机 长波长 光集成电路 

分 类 号：TN256[电子电信—物理电子学] TN491