可见与红外制导系统高通滤光片的研制  

Research and Preparation of the Visible and Infrared Control and Guide System Filters

作　　者：付秀华[1] 王刚[1] 刘冬梅[1] 张静[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《中国激光》2013年第1期174-179,共6页Chinese Journal of Lasers

摘　　要：可见与红外的制导系统作为一种制导手段,在军事领域得到了越来越广泛的重视。为了满足红外光学仪器的使用要求,根据薄膜光学理论对可见-红外3个波段进行了膜系设计;对几种常用的可见与红外材料进行对比,分别用硫化锌和氟化镱作为镀膜材料。通过电子束加热蒸发的方式,配合离子辅助淀积技术,在锗基底上制备了多层介质膜,在450～950nm波段平均反射率约为91%,3.7～4.8μm和7.5～9.0μm红外波段平均透射率约86%。该薄膜将多个波段的要求集为一体,可使光学仪器的结构得到简化。测试结果表明,此薄膜各项指标满足使用要求。Visible and infrared control and guide system as one of controling means receives extensive attention increasingly in terms of military. In order to meet the requirements of infrared optical instruments, a visible and infrared triple waveband filter film system is designed according to the theory of thin film. Through the comparative study on serveral kinds of the common materials used in visible and infrared area, ZnS and YbF3 are selected as the materials. On the substrate of Ge, coating with average reflectance 91% at 450- 950 nm while average transmittance 86 % at 3.7-4.8 μm and 7.5-9.0 μm, eletron beam and ion assisted deposition technique is used in this process. More requirements are integrated into the coatings, and the structures of optical instruments can be simplified. Results of test show that all the parameters meet the requirements.

关 键 词：薄膜 红外滤光膜 电子束蒸发 离子辅助沉积 

分 类 号：O436[机械工程—光学工程]