WC/DLC纳米多层膜微观结构研究  

Microstructure Characterization of Tungsten Carbon/Diamond-Like Carbon Multi-Layers

作　　者：王翔[1] 代明江[1] 戴达煌[1] 侯惠君[1] 林松盛[1] 

机构地区：[1]广州有色金属研究院,广州510651

出　　处：《真空科学与技术学报》2013年第1期41-44,共4页Chinese Journal of Vacuum Science and Technology

摘　　要：阳极层流型气体离子源与非平衡磁控溅射复合技术沉积制备WC/DLC纳米多层膜,并在膜/基间设计了中间过渡层。用扫描电镜、拉曼光谱仪、光电子能谱仪、X衍射仪、透射电镜、干涉显微镜等,对WC/DLC纳米多层膜的微观形貌结构进行分析研究。结果表明:沉积的WC/DLC膜层表面致密、光滑细腻;多层调制周期在3～4 nm,多层界面不清晰,形成渐变过渡界面。WC/DLC膜中主要是sp2键中掺杂有一定量的sp3键,WC则以纳米晶结构弥散分布在DLC之中。The tungsten carbon/diamond-like carbon（WC/DLC） multi-layers were deposited by anode laminar flow gas ion source and unbalanced magnetron sputtering,on substrates of silicon,stainless steel,high speed steel,and titanium alloy,respectively.The microstructures of the WC/DLC multi-layers were characterized with X-ray diffraction,X-ray photoelectron spectroscopy,scanning electron microscopy,transmission electron microscopy,and Raman spectroscopy.The results show that in the fairly smooth,compact WC/DLC multi-layers embedded with WC grains,sp2 bond dominates with a little sp3.The modulation period of the multi-layers,with ill-defined interfaces,was found to be 3～4 nm.The feasibility to scale up the newly-developed WC/DLC coating technology in industry was also tentatively discussed.

关 键 词：非平衡磁控溅射 离子源 WC DLC纳米多层膜 微观结构 

分 类 号：O484.5[理学—固体物理]