全自动荧光粉涂覆工艺及设备研究  

Research on Automatic Phosphor Coating Process and Equipment

作　　者：刘杰[1] 刘键[1] 冷兴龙[1] 屈芙蓉[1] 刘俊标[2] 吴茹菲[1] 

机构地区：[1]中国科学院微电子研究所微电子器件与集成技术重点实验室,北京100029 [2]中国科学院电工研究所,北京100190

出　　处：《半导体光电》2013年第1期66-68,共3页Semiconductor Optoelectronics

基　　金：广东省科学技术厅项目(00946220118632064);国家"973"计划项目(2010CB327702)

摘　　要：自行设计并搭建了一套全自动荧光粉涂覆系统。针对涂覆工艺,研究了有无真空搅拌除泡装置对荧光粉涂覆效果的影响,结果发现未经真空搅拌除泡处理的荧光粉涂覆层厚度均匀性较差,且涂覆层中有明显的气泡,气泡直径可达1mm;经过真空搅拌除泡处理后涂覆层厚度均匀性好且涂覆层中无气泡。利用LED光学参数综合测试仪分析了有无真空搅拌除泡装置对LED发光特性的影响,结果发现真空搅拌除泡工艺能明显提升LED光谱色度一致性。An automatic phosphor coating system was designed and set up. According to coating process, the influence of bubble-removing device on phosphor coating was investigated, and it was found that there are some bubbles with diameter less than 1 mm among the phosphor coating without bubble-removing process, and these bubbles can be removed by bubble-removing treatment. The luminescent properties of LED samples were also compared with and without bubble-removing process. Results show that chromaticity consistency can be obviously improved by using bubble-removing process.

关 键 词：LED 荧光粉涂覆 真空搅拌除泡装置 

分 类 号：TN312.8[电子电信—物理电子学]